Date of Completion

8-6-2013

Embargo Period

8-6-2013

Keywords

Nanotechnology, Nanofabriction, Glancing Angle Deposition, Oblique Angle Deposition, Physical Vapor Deposition, Nanorod

Major Advisor

Hanchen Huang

Associate Advisor

Tai-Hsi Fan

Associate Advisor

Kevin Murphy

Associate Advisor

Ugur Pasaogullari

Associate Advisor

Radenka Maric

Field of Study

Mechanical Engineering

Degree

Doctor of Philosophy

Open Access

Open Access

Abstract

The transition from nanoscience to nanotechnology is dependent on a level of scientific maturity. After over 6 decades of nanoscience, this level of maturity has only recently been approached. In this work we first present the current state of nanoscience and nanotechnology in the context of nanofabrication using solution syntheses, chemical vapor deposition and physical vapor deposition. To lay the groundwork for scientific investigation into these three, we choose physical vapor deposition as the prototype due to its high purity and elimination of interfering variables. We then present the emergence of a new level of scientific understanding of nanorod growth from physical vapor deposition, realized through the synergy of experiments, theory and simulation, and of fast diffusion on these nanorod surfaces. Throughout, we discuss the pioneering engineering advances in physical vapor deposition that lead to this realization. Further, as a true technological impact, this new level of scientific understanding has enabled the realization of room temperature metallic bonding and sealing. Moving beyond low temperature bonding, we discuss the realization of several new morphologies which may offer even more real technological impact. We close with a discussion on the importance of completing the scientific understanding of nanoscale growth from all three mechanisms- solution, chemical vapor and physical vapor- and the technologies that are primed for this impact.

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